You can get a loan to spread out payments, reducing operating costs would be similar to reducing those payments. It also impacts viability and resale in second hand markets.
The graphic from the OIST in the link makes reference to both the reduced power needed and reduced capital costs, less mirrors & cheaper EUV light source. Also, less power -> less heat -> less cooling.
I scoured for some other info as well: A single chip would go through a photo-lithography tool about 80 times. A photo-lithography tool can work on approx. 125 wafers per hour (5 FOUPS). A wafer contains ~230 chips. Current EUV light source requires a 20kw carbon laser.
